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  1. DIGILEM - Interferometric Endpoint Detector & Thin Film Monitor

    Interferometry is a powerful technique that can be used for endpoint detection of planar layer and trench etching, or deposition
    plasma2
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    semiconductors2
    deposition2
    etch1
    interference1
    Sofie1
    endpoint1
    interferometry1
    film thickness1
    interferometers1
    plasma etch1
    end point1
    dry etching1
    thickness monitors1
    dry etch1
    thin film characterisation1
    end point detection1
    endpoint detection1
    thin film measurements1
    deposition rate1
    end point detectors1
    endpointer1
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    end point systems1
    endpoint systems1
    etch rate1
    thin film monitors1
    Digilem0
    etching control0
    semiconductor characterisation0

    www.digilem.com - 2009-02-08

thermal2 glass3 thin2 evaporation1 furnace2 diet3 film5 cooling3 etch rate1 gas3 drying1 engrave1 cleaning3 metrology2 fat2 etch1 interferometers1 optics2 etching2 interferometer1 dry2 endpointer1

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